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Semiconductor Related Products



Mass-flow Control's Fluid Control Equipments

feature

1. Simple valve structure

  • Prevention system for reliquefaction of low pressure vapor gas
  • Prevention system for clogging

2. Sensor for low pressure damage

  • High precision control against minute pressure difference ( controllable under 10 torr of pressure difference )

3. Long durability

  • NI sensor is employed.
Hi-performance digital mass flow controller Compact highly functional mass flow controller